Source : Webster's Revised Unabridged Dictionary (1913)

Atomization \At`om*i*za"tion\, n.
   1. The act of reducing to atoms, or very minute particles; or
      the state of being so reduced.

   2. (Med.) The reduction of fluids into fine spray.

Source : WordNet®

atomization
     n 1: separating something into fine particles [syn: {atomisation},
           {fragmentation}]
     2: annihilation by reducing something to atoms [syn: {atomisation}]