Source : Free On-Line Dictionary of Computing

microelectromechanical system
     
         (MEMS) The integration of mechanical structures
        (moving parts) with microelectronics.  MEMS devices are
        "custom" designed for a purpose which requires a mechanical
        action to be controlled by a computer.
     
        Applications include sensors, medical devices, process
        controls.
     
        {(http://mems.mcnc.org/)}.
     
        See also {nanotechnology}.
     
        (1999-03-25)